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Pressure
Freescale Semiconductor High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated
Freescale's MP3H6115A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The small form factor and high reliability of onchip integration make the Freescale pressure sensor a logical and economical choice for the system designer. The MP3H6115A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure.
MP3H6115A Rev 4, 10/2009
MP3H6115A Series
15 to 115 kPa (2.2 to 16.7 psi) 0.12 to 2.8 V Output
Application Examples
* Aviation Altimeters * Industrial Controls * Engine Control/Manifold Absolute Pressure (MAP) * Weather Station and Weather Reporting Device Barometers
Features
* * * * * * Improved Accuracy at High Temperature Available in Super Small Outline Package 1.5% Maximum Error over 0 to 85C Ideally suited for Microprocessor or Microcontroller-Based Systems Temperature Compensated from -40 to +125C Durable Thermoplastic (PPS) Surface Mount Package ORDERING INFORMATION
Packaging Device Name Case No. Options None Super Small Outline Package (MP3H6115A Series) MP3H6115A6U * Rail 1317 MP3H6115A6T1 Tape & Reel 1317 * MP3H6115AC6U Rail 1317A MP3H6115AC6T1 Tape & Reel 1317A # of Ports Single Dual Gauge Pressure Type Differential Absolute * * * * Device Marking MP3H6115A MP3H6115A MP3H6115A MP3H6115A
* *
SUPER SMALL OUTLINE PACKAGES
MP3H6115A6U/T1 CASE 1317-04
MP3H6115AC6U/T1 CASE 1317A-04
(c) Freescale Semiconductor, Inc., 2006-2009. All rights reserved.
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 3.0 Vdc, TA = 25C unless otherwise noted, P1 > P2.)
Characteristic Pressure Range Supply Voltage(1) Supply Current Minimum Pressure Offset @ VS = 3.0 Volts Full Scale Output(3) @ VS = 3.0 Volts Full Scale Span(4) @ VS = 3.0 Volts Accuracy Sensitivity Response Time(5) Warm-Up Time Offset
(6) (2)
Symbol POP VS Io (0 to 85C) (0 to 85C) (0 to 85C) (0 to 85C) Voff VFSO VFSS -- V/P tR -- --
Min 15 2.7 -- 0.079 2.780 2.660 -- -- -- -- --
Typ -- 3.0 4.0 0.12 2.82 2.70 -- 27 1.0 20 0.25
Max 115 3.3 8.0 0.161 2.861 2.741 1.5 -- -- -- --
Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms ms %VFSS
Stability(7)
1. Device is ratiometric within this specified excitation range. 2. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 6. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 7. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
MP3H6115A 2 Sensors Freescale Semiconductor
Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Parametrics Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Output Source Current @ Full Scale Output
(2) (2)
Symbol Pmax Tstg TA I o+ Io -
Value 400 -40 to +125 -40 to +125 0.5 -0.5
Units kPa C C mAdc mAdc
Output Sink Current @ Minimum Pressure Offset
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from Vout to Gnd or Vout to VS in the application circuit.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
VS 2
Sensing Element
Thin Film Temperature Compensation and Gain Stage #1
Gain Stage #2 and Ground Reference Shift Circuitry
4
VOUT
3 GND
Pins 1, 5, 6, 7, and 8 are No Connects
Figure 1. Fully Integrated Pressure Sensor Schematic
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Pressure
On-chip Temperature Compensation and Calibration
Figure 2 illustrates the absolute sensing chip in the basic Super Small Outline chip carrier (Case 1317). Figure 3 shows a typical application circuit (output source current operation). Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over 0 to 85C temperature range. The output will saturate outside of the rated pressure range.
Fluoro Silicone Gel Die Coat P1 Wire Bond Lead frame
A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. The MP3H6115A series pressure sensor operating characteristics, internal reliability and qualification tests are based on use of dry air as the pressure media. Media other than dry air may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application.
Stainless Steel Cap Thermoplastic Case
Die
Absolute Element Sealed Vacuum Reference
Die Bond
Figure 2. Cross Sectional Diagram SSOP (not to scale)
+3 V
VS Pin 2 100 nF MP3H6115A VOUT Pin 4 GND Pin 3 47 pF 51 K to ADC
GND
Figure 3. Typical Application Circuit (Output Source Current Operation)
3.0 2.75 Transfer Function: 2.5 VOUT = VS x (.009xP-.095) Error V = 3.0 VDC 2.25 S Temp = 0 to 85C 2.0 1.75 1.5 1.25 1.0 0.75 0.5 0.25 0 Min
Max
Output (Volts)
Typ
MP3H6115A 4 Sensors Freescale Semiconductor
5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 85 90 95 100 105 110 115 120 Pressure (Reference to Sealed Vacuum) in kPa
Figure 4. Output versus Absolute Pressure
Pressure
Transfer Function (MP3H6115A) Normal Transfer Value: VOUT = VS x (0.009 x P - 0.095)
(Pressure Error x Temp. Factor x 0.009 x VS) VS = 3.0 0.3 VDC
Temperature Error Band MP3H6115A Series
4.0 Temp 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20 40 60 80 100 120 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0C to -40C and from 85C to 125C -40 0 to 85 125 Break Points Multiplier 3 1 1.75
Pressure Error Band
3.0 2.0 1.0 0.0 -1.0 -2.0
Error Limits for Pressure
Pressure Error (kPa)
20
40
60
80
100
120
Pressure (in kPa)
Pressure - 3.0 15 to 115 (kPa)
Error (Max) 1.5 (kPa)
MP3H6115A Sensors Freescale Semiconductor 5
Pressure
MINIMUM RECOMMENDED FOOTPRINT FOR SMALL AND SUPER SMALL PACKAGES
Surface mount board layout is a critical portion of the total design. The footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. With the correct pad geometry, the packages will self-align when subjected to a solder reflow process. It is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts.
0.050 1.27 TYP 0.150 3.81
0.387 9.83
0.027 TYP 8X 0.69 0.053 TYP 8X 1.35 inch mm
Figure 5. SSOP Footprint (Case 1317 and 1317A)
MP3H6115A 6 Sensors Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
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CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE
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PACKAGE DIMENSIONS
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Pressure
PACKAGE DIMENSIONS
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CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE
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Pressure
PACKAGE DIMENSIONS
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CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE
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How to Reach Us:
Home Page: www.freescale.com Web Support: http://www.freescale.com/support USA/Europe or Locations Not Listed: Freescale Semiconductor, Inc. Technical Information Center, EL516 2100 East Elliot Road Tempe, Arizona 85284 1-800-521-6274 or +1-480-768-2130 www.freescale.com/support Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) www.freescale.com/support Japan: Freescale Semiconductor Japan Ltd. Headquarters ARCO Tower 15F 1-8-1, Shimo-Meguro, Meguro-ku, Tokyo 153-0064 Japan 0120 191014 or +81 3 5437 9125 support.japan@freescale.com Asia/Pacific: Freescale Semiconductor China Ltd. Exchange Building 23F No. 118 Jianguo Road Chaoyang District Beijing 100022 China +86 10 5879 8000 support.asia@freescale.com For Literature Requests Only: Freescale Semiconductor Literature Distribution Center 1-800-441-2447 or +1-303-675-2140 Fax: +1-303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com
Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Freescale Semiconductor reserves the right to make changes without further notice to any products herein. Freescale Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale Semiconductor assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Freescale Semiconductor data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Freescale Semiconductor does not convey any license under its patent rights nor the rights of others. Freescale Semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Freescale Semiconductor product could create a situation where personal injury or death may occur. Should Buyer purchase or use Freescale Semiconductor products for any such unintended or unauthorized application, Buyer shall indemnify and hold Freescale Semiconductor and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Freescale Semiconductor was negligent regarding the design or manufacture of the part. FreescaleTM and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. (c) Freescale Semiconductor, Inc. 2009. All rights reserved.
MP3H6115A Rev.4 10/2009

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